JPH0521873Y2 - - Google Patents

Info

Publication number
JPH0521873Y2
JPH0521873Y2 JP13804089U JP13804089U JPH0521873Y2 JP H0521873 Y2 JPH0521873 Y2 JP H0521873Y2 JP 13804089 U JP13804089 U JP 13804089U JP 13804089 U JP13804089 U JP 13804089U JP H0521873 Y2 JPH0521873 Y2 JP H0521873Y2
Authority
JP
Japan
Prior art keywords
generation chamber
plasma generation
plasma
sample
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13804089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377434U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13804089U priority Critical patent/JPH0521873Y2/ja
Publication of JPH0377434U publication Critical patent/JPH0377434U/ja
Application granted granted Critical
Publication of JPH0521873Y2 publication Critical patent/JPH0521873Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
JP13804089U 1989-11-30 1989-11-30 Expired - Lifetime JPH0521873Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13804089U JPH0521873Y2 (en]) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13804089U JPH0521873Y2 (en]) 1989-11-30 1989-11-30

Publications (2)

Publication Number Publication Date
JPH0377434U JPH0377434U (en]) 1991-08-05
JPH0521873Y2 true JPH0521873Y2 (en]) 1993-06-04

Family

ID=31685170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13804089U Expired - Lifetime JPH0521873Y2 (en]) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0521873Y2 (en])

Also Published As

Publication number Publication date
JPH0377434U (en]) 1991-08-05

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